Title Influence of substrate heating on hole geometry and spatter area in femtosecond laser drilling of silicon
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Laser Micromachining for Microfluidic, Microelectronic and MEMS Applications
Laser micromachining of dielectrics and metals is a versatile fabrication and repair tool for applications in micro-fluidics, microelectronics and MEMS. Issues such as ablation threshold, ablation rate, incubation of damage at subthreshold fluences, edge resolution, debris creation and residual substrate damage are all important in determining the suitability of this technique for these applica...
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We report a simple and repeatable method for fabricating a large-area substrate for surface-enhanced Raman scattering. The substrate was processed by three steps: (i) femtosecond (fs) laser micromachining and roughening, (ii) thin-film coating, and (iii) nanosecond laser heating and melting. Numerous gold nanoparticles of various sizes were created on the surface of the silicon substrate. The 3...
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In laser drilling, an assist gas is often used to remove material from the drilling point. In order to design assist gas nozzles to minimize spatter formation, measurements of spatter trajectories are required. We apply computer vision methods to measure the 3D trajectories of spatter particles in a laser cutting event using a stereo camera configuration. We also propose a novel method for cali...
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This study investigates the effect of focal plane variation using vibration in a femtosecond laser hole drilling process on Invar alloy fabrication quality for the production of fine metal masks (FMMs). FMMs are used in the red, green, blue (RGB) evaporation process in Active Matrix Organic Light-Emitting Diode (AMOLED) manufacturing. The taper angle of the hole is adjusted by attaching the obj...
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In order to service and grow in the present day of global competition, every manufacturing concern focuses mostly on two factors i.e. productivity and quality. Laser drilling is a popular non-traditional machining technique for producing large numbers of cooling holes of various sizes (less than mm diameter) and angles in modern aerotech components such as turbine blades, injector nozzles, and ...
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تاریخ انتشار 2018